
Clean room

Yellow room
Sputtering system

Vacuum evaporator
Vacuum evaporator
Evaporator/GB Connected system

Glovebox
Fumehood
High-resolution printer
Plasma cleaner

Aqua Plasma cleaner

Parylene Coater
Laser Marker
Inert Oven
Spin Coater

Semiconductor parameter analyzer

Solar simulator

External quantum efficiency measurement system
Atomic Force Microscopy

Thickness profiler

Optical microscope
Contact angle measurement system
Resistivity measurement system
UV-Visible/NIR Spectrophotometers
Environmental tes chamber
Evoked potential/EMG measureing system